Without getting into the details of your RF simulation, try reducing your data points, using the swapfile option, using the new parser (+csfe), and finally, 64bit Spectre.Originally posted in cdnusers.org by AMSamirj
I strongly suggest using a newer version of Spectre (the USR3 version you are using dates back 2005). There have since been memory handling improvements in Spectre. Try using IC5141USR5 or better MMSIM6.2.
A thorough list of suggestions is available here: