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industry insights,lithography,OPC

  • SPIE Papers Showcase DFM and Lithography R&D

    Ten Cadence papers planned for the upcoming SPIE Advanced Lithography conference, set for Feb. 12-16 in San Jose, California, demonstrate recent R&D developments in both "design side" design for manufacturing (DFM) and the computational lithography that takes place during the manufacturing...
    Posted to Industry Insights (Weblog) by rgoering on Thu, Jan 26 2012
  • Has E-Beam Lithography Finally Found Its Niche?

    I once wrote an article about how a new technology called electron-beam (e-beam) lithography was showing great promise for semiconductor manufacturing. I will be dating myself if I tell you when it was, but here goes -- it was 1975, I was just out of college, and I was writing for a long-gone publication...
    Posted to Industry Insights (Weblog) by rgoering on Thu, Apr 8 2010
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